Semiconductor Equipment

Semiconductor equipment parts require cleanliness, no particles and vacuum compatibility, with materials including aluminum alloy, stainless steel and PEEK. Hanweite machines vacuum chambers, transmission mechanisms and insulating parts, followed by ultra-clean cleaning and individual packaging.

Industry Solutions

• Vacuum chamber: sealing surface Ra0.4, helium leak test passed
• Transmission mechanism: coaxiality and repeat positioning accuracy control
• PEEK insulating part: finished after stress relief, with stable dimensions
• Flow channel part: inner wall polished, no residual particles

Typical Parts and Processes

Independent stations in the clean machining area, followed after machining by ultrasonic cleaning + pure water rinsing + nitrogen blow-drying, vacuum packed in double-layer clean bags.

Quality Assurance

Particle inspection and cleaning records are provided per customer cleanliness requirements; key parts undergo full-dimensional CMM inspection.